Application and development of MEMS in automotive electronics

In the early 1990s, automotive airbag systems began to use MEMS accelerometers in large numbers. In the following decade, the second wave of application of MEMS technology was set off. During this period, MEMS technology was widely used, and the variety of products was gradually increased, and related technologies were applied to various industries. The second generation of technology and products replaced the former and quickly became mainstream. According to statistics, the automotive sensor market reached US$2.5 billion in 2009. Between 2004 and 2009, the global compound growth rate of the global automotive sensor market has reached about 9%. Today, the third wave of MEMS applications is approaching, and more and more MEMS accelerometers and gyroscopes will be used in more updated technology areas.

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The third wave of applications is approaching

In the Chinese market, the government is making every effort to increase the development of the automotive industry, and the automotive sensor market has become the fastest growing market. In 2009, China's automotive sensor market sales were close to 8 billion US dollars. It is estimated that from 2007 to 2010, the annual compound growth rate of automotive sensor sales in China will be higher than 35%. This kind of growth and speed cannot be ignored. China's sensor market is divided into two directions: high-end routes and low-cost routes. ADI's MEMS products are a large family, encompassing a variety of positioning categories of products, and is committed to meeting the needs of different customers.

In the current MEMS field, the challenges are mainly from system-level design, testing, analysis, embedded software development, and power management technology. Many of the other elements required to optimize the solution present many challenges for the technical engineer. We believe that perhaps in the next 10 years, MEMS sensor design needs to be further optimized by the supplier, which will enable it to provide more powerful functions and contribute to the overall cost reduction for users. This also plays a vital role in the development and advancement of MEMS motion detection.

For MEMS sensors, it is a great feature to be suitable for use in automotive electronic control systems. It has been increasingly used in automotive engine control systems, body control systems, and chassis control systems in recent years. Among them, the application of acceleration sensors in automobiles includes electronic stability control, airbag monitoring, GPS navigation and safety systems, and flip monitoring. ADI has been a leader in MEMS innovation for more than 20 years, providing comprehensive inertial sensing solutions including iMEMS accelerometers and gyroscopes, iSensor smart sensors and inertial measurement units (IMUs), and has passed TS-16949 and QS9000 Certification. ADI extends the use of MEMS products in security applications such as airbags and electronic stability systems. To date, ADI's proven motion signal processing technology has produced more than 400 million sensor products.

Application and development of MEMS in automotive electronics

The coupling of multiple energies constitutes the working principle of MEMS devices. Microsensors convert non-electrical signals into electrical signals, while microactuators convert electrical energy into mechanical motion. At the same time, Integrated Design also played a significant role in the design process of MEMS. However, in the design process of MEMS systems, the technology from IC is often used, and the process of system simulation and layout design, as well as device analysis are disconnected. This makes the organic integrated design environment impossible to form and thus cannot satisfy MEMS. The need for rapid market growth. At present, people often use a top-down approach to design MEMS. It can be seen that this forward-parallel method integrates all the links in the MEMS design, avoiding the disadvantages of the bottom-up approach, and ensuring design efficiency and design quality.

At present, manual design is still the main way of MEMS design work, mainly relying on the designer's knowledge and professional level, while the digital logic synthesis in VLSI leads the automation design trend. A fast, optimized configuration can be implemented using optimization algorithms and synthesis tools based on the requirements of the designer. It can help designers automatically generate topology maps and device structure sizes of MEMS devices, thus starting the automation design of MEMS and saving labor costs. Enable non-professional designers to participate in device development. This kind of system synthesis realizes the design synthesis of a single device, but needs to take into account the coupling effect between the MEMS systems, and debug the signal processing and control circuit parts, in addition to the complete MEMS device cell library.

The integration and packaging of MEMS chips and semiconductor chips is a new trend in the development of integrated circuit technology and a new opportunity for traditional IC manufacturers. ADI MEMS technology simplifies the use of motion detection in a wide range of industries including industrial, medical, consumer electronics, communications and automotive. Users choose ADI's iMEMS accelerometers and gyroscopes because they provide the industry's most accurate motion measurements, with the smallest size, lowest power, and highest price/performance ratio.

In the field of active and passive safety protection of automobiles, the market trend mainly includes the following aspects: First, the sensors tend to be integrated, for example, the ESP and the airbag are placed in the same ECU; secondly, the interface of the sensor will tend to be standardized, wherein Includes digital interface, SPI, DSI and PSI5. At present, the adoption rate of PSI5 in the market is higher than DSI; third, the demand for high-performance gyroscopes will gradually increase in the market, especially those with advanced driver assistance systems such as ACC; fourth, China and India At the judicial level, it has been stipulated that all cars should be equipped with 100% airbags. Fifth, European countries have also enacted regulations on pedestrian protection. Car satellite navigation will become a major trend, so frontal impact sensors will become the main solution. Program.

High performance MEMS products

ADI's iSensor motion sensor product line adds two highly integrated precision MEMS inertial sensors, the ADIS16135 and ADIS16385, to help industrial equipment manufacturers achieve stability, navigation and control. The new sensor provides tactical (< 10 degrees / hour) gyroscope performance, iSensor integration and factory calibration capabilities. The ADIS16135 iSensor Precision Angular Rate Gyroscope and the ADIS16385 iSensor 6-DOF Inertial Measurement Unit (IMU) are based on Analog Devices' iMEMS (Integrated Micro Electro Mechanical Systems) inertial sensor core technology, which provides 6 degrees/hour bias stability and 0.75 degrees/ √hr angle random walk. Both devices are fully factory calibrated to an unmatched sensitivity of 16 ppm/°C over the -40°C to +85°C temperature range with an offset stability of 0.003°/sec. These sensors use dynamic compensation to provide a simple user interface and control through standard SPI (serial peripheral interface) and register interfaces.

iSensor motion sensor products provide tactical-grade gyroscope performance, making complex stabilization applications and GPS-assisted navigation speculation easier to implement. For industrial system designers who require the highest gyroscope bias accuracy in extreme environments, the ADIS16135 gyroscope and the ADIS16385 multi-axis IMU are currently the most cost-effective products.

MEMS gyroscopes have long been the most difficult to design and manufacture MEMS devices, especially when many emerging industrial automation and instrumentation applications require high performance and low power consumption. Compared to other high-performance MEMS gyroscopes on the market, the new iMEMS gyroscopes consume only one-tenth the power of competing devices and offer higher stability and vibration resistance. The iMEMS gyroscope is based on the third generation of ADI's first three generations of MEMS gyroscopes. It uses an advanced differential four-sensor design to operate accurately under strong shock and vibration conditions. With robust performance and low power consumption of only 6 mA, this MEMS gyroscope can be effectively used in a variety of applications such as robotics, industrial instrumentation, aerospace, and platform stabilization systems for high-speed trains.

ADI's ADXRS450 iMEMS gyroscopes are designed for angular rate (rotation) inspection in harsh environments to meet ever-increasing precision, stability and vibration and shock resistance requirements. These market MEMS sensors need to provide much higher performance than motion sensors designed for consumer applications. The ADXRS450 effectively addresses the strategic and technical needs of customers in the automotive industry. To better serve the Chinese market with a broad customer base, a more technically more comprehensive gyroscope is needed, in addition to providing high-quality technology strategies to help reduce costs and improve performance and market returns. To this end, we have introduced a cost-effective ADXRS652 industrial gyroscope to meet this market demand. The ADXRS652 is a yaw rate gyroscope. Not only does it use a surface micromachining process, it also features a low-cost, fully functional angular rate sensor that integrates all the necessary signal conditioning electronics to produce a stable output voltage proportional to the angular rate of the Z-axis. A bandwidth of 0.01 Hz to 2500 Hz is established by an external capacitor, and the temperature is calibrated to the sensor using the temperature output. The device's self-test input also provides electromechanical excitation to test sensor and signal conditioning circuits for proper operation. The ADXRS652 has an impact resistance of 2000 g and is designed for industrial applications, inertial measurement units and platform stability.

In summary, ADI's main competitive advantages in the MEMS field are: First, ADI is the only manufacturer to offer low-g/high-g and gyroscopes in product arrays; secondly, ADI is extraordinary in the field of automotive safety sensors. Experience, ADI has been using the airbag sensor as the leader in MEMS business since 1989; third, ADI's solution in vibration and collision robustness (gyroscope), accelerator speed maintenance and broadband sensing, overload response, continuous self-test and Excellent advantages in low-power sensors, etc. Finally, ADI offers a full line of analog and digital sensors for ECU and satellite applications.

Helping the future development of MEMS technology

From the early 1990s, MEMS began to be applied, and in the following 10 years, the second wave of MEMS technology applications driven by consumer trends, until today has entered the third wave of MEMS. High-performance MEMS accelerometers and gyroscopes will be used in a wide range of applications, and thousands of people realize the role and potential of MEMS in all walks of life. MEMS sensor suppliers have broken through the barriers of reliability, cost and mass production, and users' demand for higher performance of MEMS has driven the advancement and development of this field. At present, MEMS technology has been able to meet a variety of customer needs, including increased reliability and safety, and support for high-precision measurement and diagnostics in the medical and industrial fields.

We believe that to win in the third wave, suppliers should not only focus on basic motion detection or add new features, but must be able to cope with more needs and challenges. New MEMS sensor designs must be under all conditions, including vibration and Temperature difference, a large amplitude impact environment, maintaining sufficient sensitivity, noise and other key characteristics. In addition, designers must provide valuable system performance improvements to automate the process and reduce system downtime, thereby reducing costs. Like ADI's MEMS technology, it simplifies the use of motion detection in a wide range of applications in industrial, medical, consumer electronics, communications and automotive, optimizing MEMS sensor design, providing more powerful features, greater efficiency, downsizing and lowering The overall cost, and these efforts will definitely promote the future development and application of MEMS technology.

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