According to the statistics of China Electronics Special Equipment Industry Association, the sales revenue of China's electronic special equipment industry accounted for only 2% of the total sales revenue of China's electronic information industry in 2009, which is not commensurate with China's production of electronic information products, especially integration. Most of the critical equipment in circuit equipment, flat panel display equipment, light-emitting diode equipment and surface mount equipment still needs to rely on imports. Therefore, domestic equipment manufacturers should use their accumulated experience in the field of semiconductor equipment, actively participate in the current emerging industries, in the photovoltaic, LED, LCD and other fields, closely follow the industry situation, actively develop automation, energy-saving, efficient equipment, improve product technology content To further meet market demand.
China's photovoltaic equipment enterprises have basically possessed the capacity of solar cell manufacturing equipment. In large-scale production, product stability is very important. To achieve a high photoelectric conversion rate, the requirements for silicon material quality and process technology level are high, and the reliability and automation of equipment directly affect the competition of enterprises. Therefore, in the future, photovoltaic equipment will aim to improve battery conversion efficiency, reduce production costs, and save energy and protect the environment. Equipment companies should strengthen the research and development of new technologies and new technologies, continuously improve the adaptability of equipment, carry out technological innovation, improve the materialization of equipment, and improve conversion efficiency and reduce photovoltaic costs from both equipment and process.
A lot of equipment is needed in the LED production process, from single crystal furnaces for sapphire substrate processing, multi-wire cutting, grinding and polishing equipment, to MOCVD (metal organic compound chemical vapor deposition), annealing furnaces, etc. The chip process is similar to equipment, such as lithography machine, etching machine, cleaning machine, evaporation coating, etc., and finally to the solid crystal machine for packaging, gold wire / aluminum wire ball welder, sorting machine, etc., a wide variety. Among them, MOCVD, plasma etching machines, etc. are high-tech equipment. Of all the LED devices, no other device, like MOCVD, accounts for such a large proportion of the total investment in LED production equipment. Domestic LED equipment manufacturers must make breakthroughs from MOCVD equipment, and gradually expand the forward and downstream process equipment, and finally realize the localization of all equipment in the entire industrial chain. The technical threshold of MOCVD equipment is very high, and it is necessary to overcome many difficulties, invest a lot of manpower, material resources, financial resources, and integrate various advantageous resources. In addition, in order to make a difference in the development of the LED industry, domestic equipment must make a good article on stability and consistency.
The government should actively advocate the establishment of technology innovation funds and technology innovation venture capital funds to promote and promote the rapid development of technological innovation in electronic special equipment enterprises. The state should further guide the integration of the industry and increase investment, especially to solve the current urgent need to combine with internationalization, and to solve the layout of high- and low-end technologies. Under the support of the state, enterprises should speed up the establishment of key laboratories for special equipment, and take the road of combining equipment and process research and development.
Tang Jingting, Director of the 48th Research Institute of China Electronics
Domestic equipment needs to support application policy
For the electronic special equipment industry, the “Twelfth Five-Year Plan†period should focus on achieving breakthroughs in the field of solar photovoltaic equipment, LED equipment and integrated circuit equipment. From the perspective of work, the state must give the equipment industry real support in policy. In terms of policy support, countries and regions such as South Korea have good experience to learn from. For domestic equipment manufacturing enterprises, many enterprises have certain development foundation and financial strength. They have already crossed the stage of pure accumulation of funds and a small amount of original accumulation. The support of funds has become less important. The investment will shift to the independent investment of enterprises. What companies lack most now is the policy of supporting applications.
Because equipment and processes are inseparable, and not all companies have the ability to build large production lines, the first policy of use should be implemented, and the financial support and the first use policy should be combined.
For 48, we will gradually improve the automation level of existing photovoltaic equipment and build an intelligent rather than extensive solar cell production line; this year we will invest 160 million yuan to develop MOCVD equipment and extend its own LED industry chain. And industrial clusters; the field of IC equipment should further improve the level of ion implanters, and will build its own integrated circuit production line within three years.
Guo Yongxing, Director of the 45th Branch of China Electric Power
Equipment development must be closely integrated with the process
"Twelfth Five-Year Plan" should focus on the development of key equipment for the manufacture of extremely large scale integrated circuits (including chip manufacturing equipment and packaging equipment) with the commanding heights of electronic information technology, and actively develop solar photovoltaic equipment, LED manufacturing equipment and LCD manufacturing equipment, and selectively Develop MEMS manufacturing equipment closely related to the Internet of Things and IGBT manufacturing equipment required for high-speed rail.
In terms of critical equipment for the manufacture of very large scale integrated circuits, I believe that it is also important to develop key equipment that can drive the upgrading of other industrial technologies and key equipment for advanced packaging. In the field of solar photovoltaic equipment, it is important to develop the current supporting capacity of the entire line. Fully automatic screen printing system, flat PECVD, large-size multi-wire cutting machine and polycrystalline automatic softening equipment; in LED manufacturing equipment, we should focus on the development of material processing equipment, MOCVD and key packaging equipment; In terms of equipment, we should focus on the development of lithography machines and ODF filling machines.
To develop China's semiconductor equipment, we must make breakthroughs in technology, break the long-term follow-up model, and take the road of leaping development. I believe that the technological breakthrough lies in: First, equipment R&D should be closely integrated with process development to establish an industry-university-research alliance for interest; second, open cooperation to achieve a benign interaction of the industry chain.
Jin Cunzhong, Vice Chairman of China Electronics Special Equipment Industry Association
Expanding domestic demand is an effective measure
During the "Twelfth Five-Year Plan" period, China should focus on the following equipment:
1. Integrated circuit production equipment. 8-inch 90nm integrated circuit can turnkey production line equipment; 12-inch 65nm integrated circuit key equipment industrialization; 8-inch semiconductor-grade single crystal growth, cutting, grinding, polishing equipment industrialization, 12-inch semiconductor-grade single crystal growth equipment.
2. Solar cell chip production equipment. 8-12 inch solar grade polysilicon, single crystal silicon growth, cutting, processing equipment industrialization; fully automatic crystalline silicon solar cell production line equipment; copper indium selenium gallium film solar energy production equipment.
3. High-brightness LED production equipment. Chip substrate single crystal growth, cutting, grinding, polishing equipment; chip production line equipment and post-packaging equipment.
4. New component production equipment. High-performance rare earth permanent magnet component production equipment; high-energy storage lithium-ion battery production equipment; metallized ultra-thin film power capacitor production equipment; ultra-small chip component production equipment; high-density printed circuit board production equipment.
5. Surface mount equipment. High-precision steel mesh automatic printing machine; high-speed, multi-function automatic placement machine; lead-free reflow soldering machine; high-precision optical inspection equipment.
During the "Twelfth Five-Year Plan" period, the market for electronic special equipment in China is mainly in China. Therefore, under the current economic situation, expanding domestic demand is the most effective measure to promote China's electronic special equipment industry.
Strengthen R&D investment, accelerate the cultivation and introduction of high-end talents, further improve the innovation system with enterprises as the mainstay, and vigorously improve the ability of independent innovation. Equipment manufacturing enterprises should speed up the establishment of product production test lines and laboratories, and realize that equipment manufacturing enterprises can provide advanced manufacturing processes for products while providing equipment.
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